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On the early history of ALD: Molecular layering

Type: 
Conference
Description: 
On the early history of ALD: molecular layering — VTT's Research Information Portal Skip to main navigation Skip to search Skip to main content VTT's Research Information Portal Home VTT's Research Information Portal Logo Home Profiles Research output Projects Datasets Research units Research Infrastructures Activities Prizes Press/Media Impacts Search by expertise, name or affiliation On the early history of ALD: molecular layering Jaan Aarik, Andrew Akbashev, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Marcel Junige, Tanja Kallio, Jaana Kanervo, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Anatoly Malkov, Anatoly Malygin, Jyrki MolariusCagla Ozgit-Akgun, Henrik Pedersen, Riikka L. Puurunen, Alexander Pyymaki-Perros, Robin HA Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin…
Publisher: 
American Vacuum Society (AVS)
Publication date: 
1 Jan 2014
Authors: 

Jaan Aarik, Andrew Akbashev, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Marcel Junige, Tanja Kallio, Jaana Kanervo, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Cagla Ozgit-Akgun, Henrik Pedersen, Riikka L Puurunen, Alexander Pyymaki-Perros, Robin HA Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E Seidel, Pia Sundberg, Jonas Sundqvist, Massimo Tallarida, J Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili Ylivaara

Biblio References: 
Origin: 
14th International Conference on Atomic Layer Deposition, ALD 2014
Link: 
https://cris.vtt.fi/en/publications/on-the-early-history-of-ald-molecular-layeri…

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