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Type: 
Conference
Description: 
Aarik, J, Akbashev, AR, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Junige, M, Kallio, T, Kanervo, J, Koshtyal, Y, Kääriäinen, ML, Kääriäinen, T, Lamagna, L, Malkov, A, Malygin, A, Molarius, J, Ozgit-Akgun, C, Pedersen, H, Puurunen, RL, Pyymaki-Perros, A, Ras, RHA, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, TE, Sundberg, P, Sundqvist, J, Tallarida, M, van Ommen, JR, Wächtler, T, Wiemer, C & Ylivaara, O 2014, Overview of early publications on atomic layer deposition. in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 … Overview of early publications on atomic layer deposition. / Aarik, Jaan; Akbashev, Andrew R.; Bechelany, Mikhael; Berdova, Maria; Cameron, David; Chekurov, Nikolai; Drozd, Viktor; Elliott, Simon; Gottardi, Gloria; …
Publisher: 
American Vacuum Society AVS
Publication date: 
1 Jan 2014
Authors: 

Jaan Aarik, Andrew R Akbashev, Mikhael Bechelany, Maria Berdova, David Cameron, Nikolai Chekurov, Viktor Drozd, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Marcel Junige, Tanja Kallio, Jaana Kanervo, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Cagla Ozgit-Akgun, Henrik Pedersen, Riikka L Puurunen, Alexander Pyymaki-Perros, Robin HA Ras, Fred Roozeboom, Timo Sajavaara, Hele Savin, Thomas E Seidel, Pia Sundberg, Jonas Sundqvist, Massimo Tallarida, J Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili Ylivaara

Biblio References: 
Origin: 
14th International Conference on Atomic Layer Deposition, ALD 2014