-A A +A
Type: 
Journal
Description: 
A new simple method combining hot-wire CVD and pulsed liquid injection of metal-organic precursor solutions was developed for production of various chalcogenide films. The grown thin Ge2Sb2Te5 films exhibit electrically and optically induced reversible phase change behavior, showing the potential of deposition method for phase change memory applications.
Publisher: 
American Chemical Society
Publication date: 
13 May 2008
Authors: 

Adulfas Abrutis, Valentina Plausinaitiene, Martynas Skapas, Claudia Wiemer, Olivier Salicio, Agostino Pirovano, Enrico Varesi, Simon Rushworth, Wojciech Gawelda, Jan Siegel

Biblio References: 
Volume: 20 Issue: 11 Pages: 3557-3559
Origin: 
Chemistry of Materials