The nature of the defects present at various Ge/GeO2 interfaces has been investigated by means of electrically detected magnetic resonance (EDMR) spectroscopy. GeO2 thin films were grown by atomic oxygen, ozone, and molecular oxygen exposure. The defect microstructure is sensitive to the oxidizing species, i.e., to the oxidation mechanism. Different EDMR spectra are correlated with the specific electrical response of the corresponding Ge/GeO2 metal-oxide-semiconductor structures.
American Institute of Physics
31 May 2010
Volume: 96 Issue: 22 Pages: 222110
Applied physics letters